Modelling and simulation of cantilever sensor using comsol. Benjeddou, it models a sandwich beam using the shear mode of the piezoelectric material to deflect the tip. Modeling and analysis for the static behavior and collapse instabilities of a mems cantilever switch subjected to both electrical and thermal loadings are presented. Consequently, comsol multiphysics is ideally suited for mems applications. The model performs a static analysis on a piezoelectric actuator based on the movement of a cantilever beam, using the piezoelectric devices predefined multiphysics interface. Design of a flat membrane module for fouling and permselectivity studies. A rectangular cantilever beam designed using comsol the suggested cantilever sensor is modeled to be highly sensitive for the detectionof physical changes or movements over the human body surface. The relationships between applied voltage against displacement and also. Abstract a comb drive actuator is a basic actuation device of mems. A detailed step by step procedure is provided in the text below. Hyperelasticity is commonly used for rubber and biological tissue.
This model shows the bending of a cantilever beam under an applied electrostatic load. Comsol, comsol desktop, comsol multiphysics, and livelink are registered trademarks or trademarks of comsol ab. Aug 28, 2007 hi everyone, ive just started to use comsol for the study of a simple cantilever beam and im facing some problems while calculating the eigenfrequencies and the frequencyresponse. Comsol multiphysics is a simulation platform that encompasses all of the steps in the modeling workflow from defining geometries, material properties, and the physics that describe specific phenomena to solving and postprocessing models for producing accurate and trustworthy results. Pohit, a large deflection model for the pullin analysis of electrostatically actuated micro cantilever beams, journal of sound and vibration 322, 2009, pp. To this end, the mems module provides predefined user interfaces with associated modeling tools, referred to as physics interfaces, for a variety of coupled physics, including electromagneticstructure, thermalstructure, or fluidstructure interactions. Piezoacoustic excitation shows spurious peaks through the entire spectrum while electrostatic excitation gives a clean resonance peak at f 0 347. The size of the system is represented by a single scale parameter l, which describes the linear scaling. The microgripper contains a stacked piezoactuator, which operates in the longitudinal mode. Bernstein, large displacement parallel plate electrostatic actuator with saturation type characteristic, sensors and actuators, 1. Mems pressure sensor drift due to hygroscopic swelling.
Static deflection is first obtained by solving nonlinear static equilibrium equation and the modal and the stability characteristics are calculated at the static equilibrium position. Use of comsol multiphysics for automated electrostatic mems. Lin 3 1 arizona state university, department of electrical engineering, tempe, az 85287 2 freescale semiconductor, sensor and analog products division, tempe, az 85284 3 university of california at berkeley, department of mechanical engineering, berkeley, ca 94720. Modeling the structuralthermalelectrical coupling in an. These devices consist of a piezoelectric material attached to a.
Actuated vibrating cantilevers piezoelectric fans have been shown to provide substantial enhancements in heat transfer over natural convection while consuming very little power. Pure parametric excitation of a micro cantilever beam. For their integration in microelectronic circuits, mems devices are bonded on printed circuit boards and connected with other devices. Hi everyone, ive just started to use comsol for the study of a simple cantilever beam and im facing some problems while calculating the eigenfrequencies and the frequencyresponse. Mems applications often require large force, large displacement, lowpower and energyefficient actuators. This paper presents an iterative method to solve the nonlinear dynamical system ofan electrostatically actuated micro cantilever in mems. This paper presents an iterative method to solve the nonlinear dynamical system ofan electrostatically actuated microcantilever in mems. Pdf simulation of cantilever beam using ansys for nano. Particle tracing particle tracing can be used as an alternative to the finite element method for solving real world.
Piezoelectric actuated microgripper this model shows the fundamentals of how to set up a piezoelectric model with mechanical contact. Analalysis and modelling of 2d model comb drive for folded flexure beam using comsol 3. Comsol 2014 full system modeling and validation of the carbon dioxide removal assembly robert coker and jim knox nasa marshall space flight center, huntsville, alabama. Assuming n force interactions between pairs of fingers, the electrostatic force is given by9 2 0 e 2 n tv f g h then, the displacement of the shuttle mass will be 23 3 0 4 f e n v l. A simulation of an electrostatically actuated cantilever beam is also reported in this paper which is commonly used in rf switches. Nonlinear structural material analysis software from comsol.
Stability, nonlinearity and reliability of electrostatically. It is now also possible to define your own material model using the user defined option. I am trying to model a microcantilever resonating in water, in order to measure the decrease in the quality factor due to water damping. The nonlinear structural materials module contains dozens of material models to help you model a wide range of solid materials. Nonlinear structural materials module updates comsol 5. Can anyone tell me the steps to apply the load and actuation voltage to the beam. Note that many of the examples featured here can also be accessed via the application libraries that are built into the comsol multiphysics software and available from the file menu. The ideal schottky, thermionic emission, and continuous quasifermi level boundary conditions have been enhanced to improve the accuracy of your semiconductor models, while saving.
Use of comsol multiphysics in undergraduate research. Inaddition, an efficient approach is proposed to expand fractional functions intotruncated. Polysilicon cantilever beam arrays with substrate fixed actuation electrodes. Then, the whole circuit is often covered with an epoxy mold compound emc to protect the devices and their interconnects with the board. Multiphysics software for finite element approach and real world simulations. Design of micro cantilever beam for vapour detection using. This paper presents the simulation of cantilever beam using ansys for nano manipulator. Iterative solution of nonlinear dynamical system of an. Different from someother iteration methods for nonlinear dynamical systems, no additionalprocedures have to be carried out to eliminate the socalled secular terms.
I tried fluidstructure interaction module but observed no change in quality factor. For users of the nonlinear structural materials module, comsol multiphysics version 5. Design of actuators and energy harvesting devices david l. Pohit, a large deflection model for the pullin analysis of electrostatically actuated microcantilever beams, journal of sound and vibration 322, 2009, pp. Polysilicon cantilever beam electrostatic pullin voltage model prediction values compared to empirical results. To explain the scaling effects on electrostatically actuated mems devices, trimmers analysis of the scaling of a simple parallel plate capacitor can be followed. Piezoelectric shearactuated beam comsol multiphysics. Download it once and read it on your kindle device, pc, phones or tablets. The relationships between applied voltage against displacement and also applied voltage against capacitance were plotted. The sensitivity of thestatic mode cantilever is best explained in terms of the spring constant as given by the following equation. How to apply load and actuation voltage to a beam in comsol. It is found that the amplitude and the frequency of the applied.
Design and simulation of various shapes of cantilever for. The prototype of e shaped cantilever shows greatest deflection of 0. Comsol multiphysics software understand, predict, and optimize. Comsol 5 for engineers kindle edition by tabatabaian, mehrzad. The model solves the deformation of the beam under an applied voltage. Particle tracing module mathematical particle tracing specify the equations of motion using massless, newtonian, lagrangian or hamiltonian formulations complete freedom over the equations solved allows, for example, ray tracing to be modeled charged particle tracing.
The model considers the microbeam as a continuous medium and the electric force as a nonlinear function of displacement and. Use of comsol multiphysics for automated electrostatic. Simultaneous contraction in the transversal direction and elongation in the longitudinal direction closes the gripper and. Nonlinear modeling method for the structural dynamic analysis of a micro cantilever beam actuated by electrostatic force is presented in this study. The thermal loading forces can be as a result of a huge amount of switching contact of the microswitch. Static analysis of electrostatically actuated micro. Steel, aluminum alloy and polyethylene have been used for design of beam type structure. For more information on how to work with the comsol multiphysics. Modeling of dielectric elastomers design of actuators and. Figure 1a shows a cross section of an encased cantilever with an integrated excitation electrode. Local heat transfer coefficients induced by piezoelectrically. The family of nonlinear elastic material models, which are already available in the solid mechanics interface, have been added to the membrane interface. Analalysis and modelling of 2d model comb drive for folded. A third book, the acdc module reference guide, contains reference material about application mode implementations and commandline programming.
Benjeddou, it models a sandwich beam using the shear mode of the. The external electrical circuits show that the drive voltage u drive is applied to the builtin drive electrode. Nonlinear structural dynamic analyses of micro cantilever. It is useful to understand how forces scale in the design of microsensors and microactuators 14, 4445. Semiconductor module updates for users of the semiconductor module, comsol multiphysics version 5. It is available in html and pdf format from the comsol help desk. Electrostatically actuated cantilever comsol multiphysics. To download the mphfiles, log in or create a comsol access account that is associated with a valid comsol license. N, india sensor system technology, vit university, vit university vellore, t. Dec 11, 2015 a schematic design of a whole electrostatically actuated cantilever.
Use features like bookmarks, note taking and highlighting while reading comsol 5 for engineers. Comsolcantilever resonating in water physics forums. Comsol multi physics, a tool for mems to analyse finite element was used to. According to the results, as the applied voltage increases the eigenvalues corresponding to the first and the second modes of the microbeam increase and decrease respectively, this behavior is continued up to a definite dc voltage where the mentioned eigenvalues coalesce, this point is regarded.
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